Microelectromechanical Devices

(3-0-0-3)

CMPE Degree: This course is Not Applicable for the CMPE degree.

EE Degree: This course is Not Applicable for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Nanotechnology

Course Coordinator:

Prerequisites: ECE 6450

Catalog Description

Fundamental concepts for design of microelectromechanical devices (MEMS), including mechanical and thermal behavior of materials and structures, transduction principles, transducer design, and modeling.

Textbook(s)

Microsystem Design

Course Outcomes

Not Applicable

Strategic Performance Indicators (SPIs)

Not Applicable

Topical Outline

1. Introduction
a. History of Microsystem Technology; Overview on Commercial Products
b. Conferences and Publications; Literature
2. The MEMS Design Cycle (Case Study: TI Digital Micromirror Device)
a. Device Idea/Concept;
b. Device Design: Modeling, Fabrication Process; Fabrication and Packaging; Testing
3. Microsystem Fabrication
a. Bulk-Micromachining
b. Surface-Micromachining
c. Materials
4. Microsystem Modeling
a. Analytical vs. Numerical Models
b. Lumped Element Modeling
c. Finite Element Modeling
5. Mechanical Analysis
a. Theory of Elasticity: Stress & Strain, Elastic Constants, Thermal Expansion and Thin-Film Stress, Non-Idealities: Large Strain & Plasticity
b. Mechanics of MEMS Structures: Torsion Bars, Axially Loaded Beams, Bending of Beams, Membranes and Plates
6. Thermal Analysis
a. Heat Transfer in MEMS Structures: Heat Conduction, Radiation, Heat Convection, Dissipative Processes
7. Transduction Mechanisms
a. Transducer Effects
b. Piezoresistivity
c. Piezoelectricity
d. Thermoelectric Effects
e. Electrostatics
f. Magnetoelectric Effects
8. Transducer Examples
a. Mechanical Transducers: Inertial Sensors (Accelerometer, Gyroscope), Pressure Sensors, Flow Sensors, Force Sensors (SPM)
b. Magnetic Transducers: Magnetic Field Sensors, Magnetic Actuators
c. Chemical/Biological Transducers
d. Thermal Transducers: Thermometers, IR Sensors