Microelectromechanical Devices

(3-0-0-3)

CMPE Degree: This course is Not Applicable for the CMPE degree.

EE Degree: This course is Not Applicable for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Nanotechnology

Course Coordinator:

Prerequisites: ECE 6450

Corequisites: None.

Catalog Description

Fundamental concepts for design of microelectromechanical devices (MEMS), including mechanical and thermal behavior of materials and structures, transduction principles, transducer design, and modeling.

Textbook(s)

Microsystem Design

Course Outcomes

Not Applicable

Student Outcomes

In the parentheses for each Student Outcome:
"P" for primary indicates the outcome is a major focus of the entire course.
“M” for moderate indicates the outcome is the focus of at least one component of the course, but not majority of course material.
“LN” for “little to none” indicates that the course does not contribute significantly to this outcome.

1. ( Not Applicable ) An ability to identify, formulate, and solve complex engineering problems by applying principles of engineering, science, and mathematics

2. ( Not Applicable ) An ability to apply engineering design to produce solutions that meet specified needs with consideration of public health, safety, and welfare, as well as global, cultural, social, environmental, and economic factors

3. ( Not Applicable ) An ability to communicate effectively with a range of audiences

4. ( Not Applicable ) An ability to recognize ethical and professional responsibilities in engineering situations and make informed judgments, which must consider the impact of engineering solutions in global, economic, environmental, and societal contexts

5. ( Not Applicable ) An ability to function effectively on a team whose members together provide leadership, create a collaborative and inclusive environment, establish goals, plan tasks, and meet objectives

6. ( Not Applicable ) An ability to develop and conduct appropriate experimentation, analyze and interpret data, and use engineering judgment to draw conclusions

7. ( Not Applicable ) An ability to acquire and apply new knowledge as needed, using appropriate learning strategies.

Strategic Performance Indicators (SPIs)

Not Applicable

Course Objectives

Topical Outline

1. Introduction
a. History of Microsystem Technology; Overview on Commercial Products
b. Conferences and Publications; Literature
2. The MEMS Design Cycle (Case Study: TI Digital Micromirror Device)
a. Device Idea/Concept;
b. Device Design: Modeling, Fabrication Process; Fabrication and Packaging; Testing
3. Microsystem Fabrication
a. Bulk-Micromachining
b. Surface-Micromachining
c. Materials
4. Microsystem Modeling
a. Analytical vs. Numerical Models
b. Lumped Element Modeling
c. Finite Element Modeling
5. Mechanical Analysis
a. Theory of Elasticity: Stress & Strain, Elastic Constants, Thermal Expansion and Thin-Film Stress, Non-Idealities: Large Strain & Plasticity
b. Mechanics of MEMS Structures: Torsion Bars, Axially Loaded Beams, Bending of Beams, Membranes and Plates
6. Thermal Analysis
a. Heat Transfer in MEMS Structures: Heat Conduction, Radiation, Heat Convection, Dissipative Processes
7. Transduction Mechanisms
a. Transducer Effects
b. Piezoresistivity
c. Piezoelectricity
d. Thermoelectric Effects
e. Electrostatics
f. Magnetoelectric Effects
8. Transducer Examples
a. Mechanical Transducers: Inertial Sensors (Accelerometer, Gyroscope), Pressure Sensors, Flow Sensors, Force Sensors (SPM)
b. Magnetic Transducers: Magnetic Field Sensors, Magnetic Actuators
c. Chemical/Biological Transducers
d. Thermal Transducers: Thermometers, IR Sensors