Semiconductor Process Control

(3-0-0-3)

CMPE Degree: This course is Not Applicable for the CMPE degree.

EE Degree: This course is Not Applicable for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Nanotechnology

Course Coordinator:

Prerequisites: CEE/ISYE/MATH 3770

Catalog Description

This course is designed to explore methods of applying statistical process
control and statistical quality control to semiconductor manufacturing
processes. Students will be required to complete a design project.

Textbook(s)

Fundamentals of Semiconductor Manufacturing and Process Control, Introduction to Statistical Quality Control

Course Outcomes

Not Applicable

Strategic Performance Indicators (SPIs)

Not Applicable

Topical Outline

1. Relevant Statistical Distributions in Semiconductor Manufacturing
2. Sampling and Estimation
3. Hypothesis Testing
4. Attribute Control Charts for Defect Control
5. Variable Control Charts for Process Control
6. Advanced Control Charts (CUSUM, EWMA, Multivariate)
7. Time-Series Modeling of In-Situ Sensor Data
8. Experimental Design Methods for Characterizing IC Fabrication Processes
9. Analyzing Experimental Results
10. Statistical Software Packages
11. Analysis of Process Variation Using Principal Components
12. Response Surface Modeling of Unit Processes
13. Integrated Circuit Design for Manufacturability
14. Parametric and Catastrophic IC Yield Modeling