Introduction to Microelectronics Technology

(3-0-0-3)

CMPE Degree: This course is Not Applicable for the CMPE degree.

EE Degree: This course is Not Applicable for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Nanotechnology

Course Coordinator:

Prerequisites: None.

Corequisites: None.

Catalog Description

Presents the fundamentals of microelectronics material, device, and circuit
fabrication

Textbook(s)

Fabrication Engineering at the Micro and Nanoscale

Course Outcomes

Not Applicable

Student Outcomes

In the parentheses for each Student Outcome:
"P" for primary indicates the outcome is a major focus of the entire course.
“M” for moderate indicates the outcome is the focus of at least one component of the course, but not majority of course material.
“LN” for “little to none” indicates that the course does not contribute significantly to this outcome.

1. ( Not Applicable ) An ability to identify, formulate, and solve complex engineering problems by applying principles of engineering, science, and mathematics

2. ( Not Applicable ) An ability to apply engineering design to produce solutions that meet specified needs with consideration of public health, safety, and welfare, as well as global, cultural, social, environmental, and economic factors

3. ( Not Applicable ) An ability to communicate effectively with a range of audiences

4. ( Not Applicable ) An ability to recognize ethical and professional responsibilities in engineering situations and make informed judgments, which must consider the impact of engineering solutions in global, economic, environmental, and societal contexts

5. ( Not Applicable ) An ability to function effectively on a team whose members together provide leadership, create a collaborative and inclusive environment, establish goals, plan tasks, and meet objectives

6. ( Not Applicable ) An ability to develop and conduct appropriate experimentation, analyze and interpret data, and use engineering judgment to draw conclusions

7. ( Not Applicable ) An ability to acquire and apply new knowledge as needed, using appropriate learning strategies.

Strategic Performance Indicators (SPIs)

Outcome 1 (Students will demonstrate expertise in a subfield of study chosen from the fields of electrical engineering or computer engineering):
1. Understand the theoretical underpinnings of the common materials and technologies used to realize integrated circuits.

Outcome 2 (Students will demonstrate the ability to identify and formulate advanced problems and apply knowledge of mathematics and science to solve those problems):
1. Design basic process flows for integrated circuit processes such as patterning materials and photolithography.

Outcome 3 (Students will demonstrate the ability to utilize current knowledge, technology, or techniques within their chosen subfield):
N/A

Course Objectives

Topical Outline

I. Hot Processing and Ion Implantation
A. Diffusion
B. Thermal oxidation
C. Ion implantation
D. Rapid thermal processing

II. Pattern Transfer
A. Optical lithography
B. Photoresists
C. E-beam and x-ray lithography
D. Vacuum science and plasma
E. Etching

III. Thin Films
A. Deposition: evaporation and sputtering
B. Chemical vapor deposition
C. Epitaxial growth

IV. Characterization
A. Electrical (Hall, CV, IV, etc.)
B. Structural (x-ray, TEM, SEM, etc.)
C. Optical (photoluminscence, absorption, etc.)

V. Process Control and Circuit Fabrication
A. Process simulation tools and process monitoring
B. Yield and reliability
C. Integration
D. Packaging