Introduction to Microelectronics Technology

(3-0-0-3)

CMPE Degree: This course is Not Applicable for the CMPE degree.

EE Degree: This course is Not Applicable for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Nanotechnology

Course Coordinator:

Prerequisites: None.

Catalog Description

Presents the fundamentals of microelectronics material, device, and circuit
fabrication

Textbook(s)

Fabrication Engineering at the Micro and Nanoscale

Course Outcomes

Not Applicable

Strategic Performance Indicators (SPIs)

Outcome 1 (Students will demonstrate expertise in a subfield of study chosen from the fields of electrical engineering or computer engineering):
1. Understand the theoretical underpinnings of the common materials and technologies used to realize integrated circuits.

Outcome 2 (Students will demonstrate the ability to identify and formulate advanced problems and apply knowledge of mathematics and science to solve those problems):
1. Design basic process flows for integrated circuit processes such as patterning materials and photolithography.

Outcome 3 (Students will demonstrate the ability to utilize current knowledge, technology, or techniques within their chosen subfield):
N/A

Topical Outline

I. Hot Processing and Ion Implantation
A. Diffusion
B. Thermal oxidation
C. Ion implantation
D. Rapid thermal processing

II. Pattern Transfer
A. Optical lithography
B. Photoresists
C. E-beam and x-ray lithography
D. Vacuum science and plasma
E. Etching

III. Thin Films
A. Deposition: evaporation and sputtering
B. Chemical vapor deposition
C. Epitaxial growth

IV. Characterization
A. Electrical (Hall, CV, IV, etc.)
B. Structural (x-ray, TEM, SEM, etc.)
C. Optical (photoluminscence, absorption, etc.)

V. Process Control and Circuit Fabrication
A. Process simulation tools and process monitoring
B. Yield and reliability
C. Integration
D. Packaging