Integrated Circuit Fabrication

This course is no longer offered


CMPE Degree: This course is for the CMPE degree.

EE Degree: This course is for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Courses for non-ECE majors, Nanotechnology

Course Coordinator:

Prerequisites: ECE 3030 [min C] or ECE 3040 [min C] or ECE 3710

Corequisites: None.

Catalog Description

The objective of this course is to give students exposure to the various
steps involved in the fabrication of integrated circuits and devices.
'The course will include a laboratory segment in which students
fabricate MOS transistors, diffused resistors and MOS capacitors from a
bare silicon substrate. Crosslisted with CHE 4752.

Course Outcomes

Not Applicable

Student Outcomes

In the parentheses for each Student Outcome:
"P" for primary indicates the outcome is a major focus of the entire course.
“M” for moderate indicates the outcome is the focus of at least one component of the course, but not majority of course material.
“LN” for “little to none” indicates that the course does not contribute significantly to this outcome.

1. ( ) An ability to identify, formulate, and solve complex engineering problems by applying principles of engineering, science, and mathematics

2. ( ) An ability to apply engineering design to produce solutions that meet specified needs with consideration of public health, safety, and welfare, as well as global, cultural, social, environmental, and economic factors

3. ( ) An ability to communicate effectively with a range of audiences

4. ( ) An ability to recognize ethical and professional responsibilities in engineering situations and make informed judgments, which must consider the impact of engineering solutions in global, economic, environmental, and societal contexts

5. ( ) An ability to function effectively on a team whose members together provide leadership, create a collaborative and inclusive environment, establish goals, plan tasks, and meet objectives

6. ( ) An ability to develop and conduct appropriate experimentation, analyze and interpret data, and use engineering judgment to draw conclusions

7. ( ) An ability to acquire and apply new knowledge as needed, using appropriate learning strategies.

Strategic Performance Indicators (SPIs)

Not Applicable

Course Objectives

Topical Outline

1. Overview of Silicon Processing
2. Crystal Growth and Doping
3. Substrate Characterization
4. Oxidation
5. Photolithography
6. Etching
7. Diffusion
8. Ion Implantation
9. Metallization
10. Epitaxial Growth and CVD
11. SUPREM Simulation
12. Device Characterization and Measurement
13. CMOS Process Integration
14. Bonding and Packaging
15. Yield