Integrated Circuit Fabrication
(2-0-0-3)
CMPE Degree: This course is for the CMPE degree.
EE Degree: This course is for the EE degree.
Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.
Technical Interest Group(s) / Course Type(s): Courses for non-ECE majors, Nanotechnology
Course Coordinator:
Prerequisites: ECE 3030 [min C] or ECE 3040 [min C] or ECE 3710
Catalog Description
The objective of this course is to give students exposure to the varioussteps involved in the fabrication of integrated circuits and devices.
'The course will include a laboratory segment in which students
fabricate MOS transistors, diffused resistors and MOS capacitors from a
bare silicon substrate. Crosslisted with CHE 4752.
Textbook(s)
Fundamentals of Semiconductor FabricationCourse Outcomes
Not Applicable
Strategic Performance Indicators (SPIs)
Not Applicable
Topical Outline
1. Overview of Silicon Processing
2. Crystal Growth and Doping
3. Substrate Characterization
4. Oxidation
5. Photolithography
6. Etching
7. Diffusion
8. Ion Implantation
9. Metallization
10. Epitaxial Growth and CVD
11. SUPREM Simulation
12. Device Characterization and Measurement
13. CMOS Process Integration
14. Bonding and Packaging
15. Yield