Integrated Circuit Fabrication

This course is no longer offered

(2-0-0-3)

CMPE Degree: This course is for the CMPE degree.

EE Degree: This course is for the EE degree.

Lab Hours: 0 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Courses for non-ECE majors, Nanotechnology

Course Coordinator:

Prerequisites: ECE 3030 [min C] or ECE 3040 [min C] or ECE 3710

Catalog Description

The objective of this course is to give students exposure to the various
steps involved in the fabrication of integrated circuits and devices.
'The course will include a laboratory segment in which students
fabricate MOS transistors, diffused resistors and MOS capacitors from a
bare silicon substrate. Crosslisted with CHE 4752.

Course Outcomes

Not Applicable

Strategic Performance Indicators (SPIs)

Not Applicable

Topical Outline

1. Overview of Silicon Processing
2. Crystal Growth and Doping
3. Substrate Characterization
4. Oxidation
5. Photolithography
6. Etching
7. Diffusion
8. Ion Implantation
9. Metallization
10. Epitaxial Growth and CVD
11. SUPREM Simulation
12. Device Characterization and Measurement
13. CMOS Process Integration
14. Bonding and Packaging
15. Yield