Integrated Circuit Fabrication


CMPE Degree: This course is Elective for the CMPE degree.

EE Degree: This course is Selected Elective for the EE degree.

Lab Hours: 3 supervised lab hours and 0 unsupervised lab hours.

Technical Interest Group(s) / Course Type(s): Courses for non-ECE majors, Nanotechnology

Course Coordinator: Albert B Frazier

Prerequisites: (ECE 3030 [min C] or ECE 3040 [min C]) and ECE 2031 [min C]

Corequisites: None.

Catalog Description

Introduction to microelectronic processing technologies and CMOS. Includes a laboratory for fabrication/testing of MOS transistors, basic CMOS circuits, integrated resistors and capacitors.


Course Outcomes

  1. Fabricate CMOS circuitry using a basic CMOS manufacturing procedure.
  2. Perform common fabrication processes used in microelectronics fabrication.
  3. Test integrated circuits and interpret non-ideal behaviors.
  4. Correlate non-ideal IC behavior back to the processes used to fabricate the device under test.
  5. Model IC physical parameters such as junction depth, dopant concentration and modify fabrication process flow designs to improve device performance
  6. Write technical reports related to the laboratory experiences, integrated circuit characterization, and a process design project.
  7. Compile a Process Design Project including analyzing non-ideal performance of fabricated ICs, developing a process flow to improve performance.

Student Outcomes

In the parentheses for each Student Outcome:
"P" for primary indicates the outcome is a major focus of the entire course.
“M” for moderate indicates the outcome is the focus of at least one component of the course, but not majority of course material.
“LN” for “little to none” indicates that the course does not contribute significantly to this outcome.

1. ( P ) An ability to identify, formulate, and solve complex engineering problems by applying principles of engineering, science, and mathematics

2. ( M ) An ability to apply engineering design to produce solutions that meet specified needs with consideration of public health, safety, and welfare, as well as global, cultural, social, environmental, and economic factors

3. ( M ) An ability to communicate effectively with a range of audiences

4. ( LN ) An ability to recognize ethical and professional responsibilities in engineering situations and make informed judgments, which must consider the impact of engineering solutions in global, economic, environmental, and societal contexts

5. ( M ) An ability to function effectively on a team whose members together provide leadership, create a collaborative and inclusive environment, establish goals, plan tasks, and meet objectives

6. ( P ) An ability to develop and conduct appropriate experimentation, analyze and interpret data, and use engineering judgment to draw conclusions

7. ( LN ) An ability to acquire and apply new knowledge as needed, using appropriate learning strategies.

Strategic Performance Indicators (SPIs)

Not Applicable

Course Objectives

  1. learn the basic fabrication processes used to fabricate integrated circuits. [c]
  2. attain hands-on experience in fabricated integrated circuits & devices and characterizing the resulting electronic circuit. [b, k]
  3. engage in formal written communication exercises including laboratory reports and design projects. [g]
  4. learn how to correlate non-ideal integrated circuit operation back to the fabrication process used to manufacture the device under test. [a, e]
  5. learn how to model integrated circuits based on processing parameters. [a, e]
  6. learn how to modify integrated circuit fabrication processes to improve device performance. [c, e]

Topical Outline

Introduction, Safety, and Semiconductor Materials





Wet Etching Tech

Plasma Processing


Ion Implantation

CVD Processes

MEMS Processes