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Photo file: 
Farrokh Ayazi
Full name: 
Farrokh Ayazi
Job title: 
Regents Entrepreneur
; Regents’ Entrepreneur; Director, Georgia Tech Analog Consortium; Ken Byers Professorship in Communications Network
Technical Interest Groups: Electronic Design and Applications (Group Chair), Nanotechnology
Email address: 
Work phone: 
TSRB 448

Professor Ayazi received the B.S. degree in electrical engineering from the University of Tehran, Iran, in 1994, and the M.S. and the Ph.D. degrees in electrical engineering from the University of Michigan, Ann Arbor, in 1997 and 2000, respectively.

He joined the ECE faculty at Georgia Institute of Technology in December 1999. His main research focus has been in the area of Integrated MEMS and Microsystems Technology. He has served on the technical program committees of the IEEE International Solid State Circuits Conference (ISSCC), IEEE Micro-Electro-Mechanical Systems (MEMS) Conference, International Electron Devices Meeting (IEDM), and Transducers and IEEE Sensors Conference. He is an editor for IEEE/ASME Journal of Microelectromechanical Systems (JMEMS).

Dr. Ayazi is the co-founder and Chief Technology Officer (CTO) of Qualtré Inc., a spin-out from his research Laboratory that commercializes bulk-acoustic-wave (BAW) silicon gyroscopes and multi-degrees-of-freedom inertial sensors for consumer electronics and personal navigation systems.

Research interests: 
  • Integrated Micro & Nano Electromechanical Resonators
  • VLSI Analog Integrated Circuits
  • MEMS Inertial Sensors (Integrated Gyroscopes and Accelerometers)
  • Micro and nanofabrication technologies
  • Best Student Paper Award at IEEE International Frequency Control Symposium (IFCS 2010), and IEEE Sensors 2007.
  • 2005 GOMACTech-04 Meritorius Paper Award
  • 2004 NSF CAREER Award
  • 2004 Richard M. Bass Outstanding Teacher Award (as determined by the vote of the ECE senior class).
  • 2001-2002 Georgia Tech College of Engineering Cutting Edge Research Award
  • Rackham Predoctoral Fellowship from University of Michigan in 1998-99.

G. K. Ho and F. Ayazi, "Low frequency process-variation-insensitive temperature compensated temperature-stable micromechanical resonators," US patent 7,859,365, issue date December 28, 2010.

F. Ayazi and R. Abdolvand, "Monolithic Thin-Film Piezoelectric Filters," US patent 7,847,656, issue date December 7, 2010.

F. Ayazi, M. Rais-Zadeh, and P. Kohl, "MEMS switched tunable inductors," US patent 7,847,669, issue date December 7, 2010.

Z. Hao, and F. Ayazi, "High-Q Longitudinal Block Resonators with Annexed Platform for Mass Sensing Applications," US patent 7,819,011, issue date October 26, 2010.

F. Ayazi and R. Abdolvand, "Piezo-on-diamond resonators and resonator systems," US patent 7,812,692, issue date October 12, 2010.

F. Ayazi, R. Abdolvand, H. Mirilavasani, "Single-resonator dual-frequency lateral-extension mode piezoelectric oscillators, and operating methods thereof," US patent 7,800,282, issue date September 21, 2010.

F. Ayazi, "Method for Sealing and Backside Releasing of Microelectromechanical Systems," US patent 7,767,484, issue date August 3, 2010.

F. Ayazi, B. Vakili Amini, and R. Abdolvand, "Capacitive microaccelerometers and fabrication methods," US patent 7,757,393, issue date July 20, 2010.

P. Monajemi, P. Joseph, P. Kohl, and F. Ayazi, "A Low Cost Wafer-Level MEMS Packaging Technology," /Proc. IEEE Micro Electro Mechanical Systems Conference (MEMS'05)/, Miami, FL, Jan. 2005,pp. 634-637.

S. Pourkamali and F. Ayazi, "Electrically Coupled MEMS Bandpass Filters, Parts I and II" Sensors and Actuators A, Aug. 2005, pp. 307-325.

K. Sundaresan, G.K. Ho, S. Pourkamali, and F. Ayazi, "A Two-Chip, 4-MHz Microelectromechanical Reference Oscillator," /Proc. 2005 IEEE International Symposium on Circuits and Systems (ISCAS 2005)/, May 2005, pp. 5461-5464.

Z. Hao, S. Pourkamali, and F. Ayazi, "VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part I: Design and Modeling," IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1043-1053.

S. Pourkamali, Z. Hao, and F. Ayazi, "VHF Single Crystal Silicon Elliptic Bulk-Mode Capacitive Disk Resonators; Part II: Implementation and Characterization," IEEE Journal of Microelectromechanical Systems, Vol. 13, No. 6, Dec. 2004, pp. 1054-1062.

B.V. Amini and F. Ayazi, "A 2.5V 14-bit Sigma-Delta CMOS-SOI Capacitive Accelerometer," IEEE Journal of Solid State Circuits, Dec. 2004, pp. 2467-2476.

F. Ayazi and K. Najafi, "A HARPSS Polysilicon Vibrating Ring Gyroscope," IEEE Journal of Microelectromechanical Systems, Vol. 10, June 2001, pp. 169-179.

Last revised December 16, 2022